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John S. Baras
Distinguished University Professor of Electrical and Computer Engineering and the Institute for Systems Research
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Performance evaluation of run-to-run control methods in semiconductor processes
Zhang, Chang., Deng, Hao., Baras, John S., "Performance evaluation of run-to-run control methods in semiconductor processes",
2003 IEEE Conference on Control Applications
, pp. 841-848, Istanbul, Turkey, June 23-25, 2003
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