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Publications

Zhang, Chang., Deng, Hao., Baras, John S., "Performance evaluation of run-to-run control methods in semiconductor processes", 2003 IEEE Conference on Control Applications, pp. 841-848, Istanbul, Turkey, June 23-25, 2003
Zhang, Chang., Deng, Hao., Baras, John S., "Comparison of Run-to-Run Control Methods in Semiconductor Manufacturing Processes", AEC/APC Symposium XII, Vol. II, pp. 889-896, Lake Tahoe, Nevada, September 23-28, 2000
Zhang, Chang., Deng, Hao., Baras, John S., "The Set-Valued Run-to-Run Controller with Ellipsoid Approximation", AEC/APC Symposium XII, Vol. I, pp. 167-178, Lake Tahoe, Nevada, September 23-28, 2000
Zhang, Chang., Deng, Hao., Baras, John S., "Run-to-Run Control Methods Based on the DHOBE Algorithm", Automatica, Vol. 39, Issue 1, pp. 35-45, 2003
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