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Comparison of Run-to-Run Control Methods in Semiconductor Manufacturing Processes

Type: 
Conference PaperInvited and refereed articles in conference proceedings
Authored by:
Zhang, Chang., Deng, Hao., Baras, John S.
Conference date:
September 23-28, 2000
Conference:
AEC/APC Symposium XII, Vol. II, pp. 889-896
Full Text Paper: 
Abstract: 

In this paper, RtR control methods are generalized. The set-valued RtR controllers with ellipsoid approximation are compared with other RtR controllers by simulation according to the following principles:

  • A good RtR controller should be able to compensate for various disturbances, such as small drifts and  large step disturbances. 
  • It should be able to deal with constraints, cost requirement, multiple targets, time delays etc.

Preliminary results show the satisfactory performance of the set-valued RtR controller with ellipsoid approximation.