Type:
Conference Paper›Invited and refereed articles in conference proceedings
Authored by:
Baras, John S., Patel, Nital S.
Conference date:
May 5-10, 1996
Conference:
13th International Conference on Chemical Vapor Deposition (CVD-XIII), Vol. 96-5, pp. 171-176
Full Text Paper:
Abstract:
This paper presents application of robust multivariable nonlinear control to the temperature control problem for rapid thermal processing systems. The controller designed achieves good tracking and temperature uniformity for a wide range of processing conditions.