@conference {
	title = {Robust Nonlinear Control of a Rapid Thermal Processor},
	author = {Baras, John S., Patel, Nital S.},
	year = {1996},
	month = {05/1996},
	abstract = {This paper presents application of robust multivariable nonlinear control to the temperature control problem for rapid thermal processing systems. The controller designed achieves good tracking and temperature uniformity for a wide range of processing conditions.},
	address = {Los Angeles, CA},
	booktitle = {13th International Conference on Chemical Vapor Deposition (CVD-XIII)},
	pages = {pp. 171-176}
}
