@conference {
	title = {Performance evaluation of run-to-run control methods in semiconductor processes},
	author = {Zhang, Chang., Deng, Hao., Baras, John S.},
	year = {2003},
	month = {06/2003},
	abstract = {Run-to-run (RtR) control plays an important role in semiconductor manufacturing processes. In this paper, RtR control methods are classified and evaluated. The set-valued RtR controllers with ellipsoid approximation are compared with two typical RtR controllers: the exponentially weighted moving average (EWMA) controller and the optimizing adaptive quality controller (OAQC) by simulations according to the following criteria: a good RtR controller should be able to compensate for various disturbances, such as small drifts, step disturbances and model errors; moreover, it should be able to deal with bounds, cost requirement and multiple targets that are often encountered in semiconductor processes. Based on our simulation results, suggestions on selection of a proper RtR controller for a semiconductor process are given as conclusions.},
	address = {Istanbul, Turkey},
	booktitle = {2003 IEEE Conference on Control Applications},
	pages = {pp. 841-848}
}
@conference {
	title = {A New Adaptive Aggregation Algorithm for Infinite Horizon Dynamic Programming},
	author = {Zhang, Chang., Baras, John S.},
	year = {2003},
	month = {06/2003},
	abstract = {Dynamic programming suffers the {\textquotedblleft}curse of dimensionality{\textquotedblright} when it is employed for complex control systems. State aggregation is used to solve the problem and accelerate computation by looking for a sub-optimal policy. In this paper, a new method, which converges much faster than conventional aggregated value iteration based on TD(0), is proposed for computing the value functions of the aggregated system. Preliminary results show that the new method increases the speed of convergence impressively. Aggregation introduces errors inevitably. An adaptive aggregation scheme employing the new computation method is also proposed to reduce the aggregation errors.},
	address = {Rhodes, Greece},
	booktitle = {11th Mediterranean Conference on Control and Automation (MED\&rsquo;03)},
	pages = {pp. 1-6}
}
