@conference {
	title = {Comparison of Run-to-Run Control Methods in Semiconductor Manufacturing Processes},
	author = {Zhang, Chang., Deng, Hao., Baras, John S.},
	year = {2000},
	month = {09/2000},
	abstract = {In this paper, RtR control methods are generalized. The set-valued RtR controllers with ellipsoid approximation are compared with other RtR controllers by simulation according to the following principles:

A good RtR controller should be able to compensate for various disturbances, such as small drifts and ~large step disturbances.~
	It should be able to deal with constraints, cost requirement, multiple targets,~time delays etc.
Preliminary results show the satisfactory performance of the set-valued RtR controller with ellipsoid approximation.~},
	address = {Lake Tahoe, Nevada},
	booktitle = {AEC/APC Symposium XII},
	pages = {pp. 889-896}
}
@conference {
	title = {The Set-Valued Run-to-Run Controller with Ellipsoid Approximation},
	author = {Zhang, Chang., Deng, Hao., Baras, John S.},
	year = {2000},
	month = {09/2000},
	address = {Lake Tahoe, Nevada},
	booktitle = {AEC/APC Symposium XII},
	pages = {pp. 167-178}
}
