@techreport {
	title = {Performance Evaluation of Run-to-Run Control Methods in Semiconductor Processes},
	author = {Zhang, Chang.},
	year = {2001},
	month = {01/2001},
	abstract = {Run-to-Run (RtR) control plays an important role in semiconductormanufacturing processes. In this paper, RtR control methods are classified and evaluated. The set-valued RtR controllers with ellipsoid approximation are compared with two typical RtR controllers: the Exponentially Weighted Moving Average (EWMA) controller and the Optimizing Adaptive Quality Controller (OAQC) by simulations according to the following criteria: A good RtR controller should be able to compensate for various disturbances, such as small drifts, step disturbances and model errors; moreover, it should be able to deal with bounds, cost requirement and multipletargets that are often encountered in semiconductor processes. Based on our simulation results, suggestions on selection of a proper RtR controller for a semiconductor process are given as conclusions.},
	number = {Number: CSHCN TR 2001-20}
}
